Ceramic Slot Boat for Wafer Carrier

Brand Name
3X Ceramic Parts
Material Type
zirconia ceramic
Forming Way
isostatic pressing
1 piece
custom make
6.0 g /cm3
Main Property
slip free
Machining Way
Compressive Strength
2000 Mpa
Delivery Time
25 days around
Shipping Way
by express

Slip Free Ceramic Slot Boat for Wafer Carrier 

The slip free ceramic slot boat  vertical carriers or boats for holding semiconductor wafers during heat processing and is particularly concerned with a vertical carrier designed to effectively support large semiconductor wafers having nominal diameters equal to or greater than about 200 millimeters, preferably wafers having nominal diameters of about 300 millimeters or greater.

Semiconductor wafers, especially those made of silicon, may be conventionally processed by placing them horizontally into a holding device or carrier at intervals in the vertical direction and exposing the wafer's surfaces to high temperature gases in a furnace, usually to form an oxide film on these surfaces or to deposit certain atoms therein. To maximize the amount of surface area exposed to the heat treatment, the wafers are usually held in “boats” or carriers typically comprised of parallel vertical supports or rails having relatively short slots evenly spaced along their length. The slots in one support are normally aligned with slots in the other support so a wafer can be jointly received by a corresponding slot in each support. By placing wafers in appropriate slots on the supports, the boat can carry a stack of wafers separated from each other so that both sides of the wafer are exposed to the heat treatment.

Online Inquiry