Semiconductor Ceramic Arm handling 4" 6" 8" wafer

Brand Name
3X Ceramic Parts
Material Type
alumina ceramic
Forming Way
isostatic pressing
MOQ
1 piece
Specification
custom make
Density
3.9g/cm3
Application
semiconductor
Main Property
high precision
Machining Way
cnc maching
Tolerance
±0.01mm
Shipping Way
air express
HS CODE
8547100000
PACKAGE
safety packing

Semiconductor Ceramic Arm handling 4", 6", 8" wafer

This alumina ceramic arm is designed for handling 4", 6", 8" silicon wafer . Customer has requirements on the electrical conductivity  as follows : 

1. acceptance criteria:  1*10E4<R<1*10E9 Ω

2. reference acceptance scheme:  Friction the surface of spare parts and measure it with a surface electrostatic tester. The electrostatic pressure is less than 50V.

Customer don't require these pore sizes. We help them to  design . The positions of suction cups, dimensions of inlet and outlet holes, installation positions and overall dimensions we need should be marked in the drawings

The electrostatic test method of the arm is to rub the surface of the arm and measure it with a surface electrostatic tester. If the electrostatic pressure is less than 50V, it will pass. 

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