Zirconia Ceramic Long Tooth Rails for Wafer Handling

Brand Name
3X Ceramic Parts
Material Type
zirconia ceramic
Forming Way
isostatic pressing
MOQ
1 piece
Specification
custom make
Density
6.0g/cm3
Thermal Conductivity
2.5 W/ (m.k)
Thermal Shock Resistant
250 △ T° C
Compressive Strength
2000 Mpa
Flexural Strength
800 Mpa
Tolerance
0.001mm
HS CODE
8547100000

Zirconia Ceramic Long Tooth Rails  for Wafer Handling  

Zirconia Ceramic long tooth rails could also called as ceramic comb , ceramic gripper . It is made of zirconia ceramic material because this type of ceramic material are high temperature resistant , corrossion resistant and very wearable.  It is also very easy to clean and wash because of its smooth and density surface .  The zirconia ceramic tooth rails adopt special processing technology which greatly reduce the marks on the wafers .  It is assembled on the automatic wafer handling system for DOA equipment . 

The automatic wafer handling system DOA equipment  integrated wafer loading & unloading, unloading the wafers from the Ceramic boat to the cassette or loading the wafers from the cassette to the ceramic  boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production or be used only for wafer loading or unloading is also available.

The parameters of zirconia ceramic long tooth rails for wafer handling : 

Model  Value 
Wafer Size (mm)  210mm
Breakage Rate  ≤0.03%
Footprint  custom make 
Ceramic Boat Dimension 1200 pieces / boat ,  pitch 3.15
Capability  1000000 pieces / month 
Loading Method  Square shape wafer loading 
Power Consumption  13KW
Machining Way  flapping , grinding 

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