Zirconia Ceramic Long Tooth Rails for Wafer Handling

Brand Name
3X Ceramic Parts
Material Type
zirconia ceramic
Forming Way
isostatic pressing
1 piece
custom make
Thermal Conductivity
2.5 W/ (m.k)
Thermal Shock Resistant
250 △ T° C
Compressive Strength
2000 Mpa
Flexural Strength
800 Mpa

Zirconia Ceramic Long Tooth Rails  for Wafer Handling  

Zirconia Ceramic long tooth rails could also called as ceramic comb , ceramic gripper . It is made of zirconia ceramic material because this type of ceramic material are high temperature resistant , corrossion resistant and very wearable.  It is also very easy to clean and wash because of its smooth and density surface .  The zirconia ceramic tooth rails adopt special processing technology which greatly reduce the marks on the wafers .  It is assembled on the automatic wafer handling system for DOA equipment . 

The automatic wafer handling system DOA equipment  integrated wafer loading & unloading, unloading the wafers from the Ceramic boat to the cassette or loading the wafers from the cassette to the ceramic  boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production or be used only for wafer loading or unloading is also available.

The parameters of zirconia ceramic long tooth rails for wafer handling : 

Model  Value 
Wafer Size (mm)  210mm
Breakage Rate  ≤0.03%
Footprint  custom make 
Ceramic Boat Dimension 1200 pieces / boat ,  pitch 3.15
Capability  1000000 pieces / month 
Loading Method  Square shape wafer loading 
Power Consumption  13KW
Machining Way  flapping , grinding 

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